Acta Acustica

Design and analysis of SAW pressure sensing element based on IDT/AlN/Mo/diamond multilayered structure

Xiaoxin Ma, Qiang Xiao, Yanping Fan and Xiaojun Ji

Acta Acust., 6 (2022) 38

Published online: 14 September 2022

DOI: 10.1051/aacus/2022038

Xiaoxin Ma

Qiang Xiao

Yanping Fan

Xiaojun Ji

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