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High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones
Shuzheng Shi, Liyong Ma, Kai Kang, Jie Zhu, Jinjiang Hu, Hong Ma, Yongjun Pang and Zhanying Wang Micromachines 14(8) 1598 (2023) https://doi.org/10.3390/mi14081598
Theoretical and Experimental Studies on Sensitivity and Bandwidth of Thickness-Mode Driving Hydrophone Utilizing A 2-2 Piezoelectric Single Crystal Composite