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Figure 1

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Sketch of the topology of a piezoelectric MEMS loudspeaker. We have piezoelectric Ωp, flexible solid Ωs, thermoviscous acoustic Ωtv and acoustic Ωa domains with their interfaces Γstv, Γptv, Γatv. Boundary conditions are applied on solid (Γs), piezoelectric (Γp, Γe and Γ0), and thermoviscous (Γtv) boundaries.
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