Displacement at the tip of the cantilever with an excitation of 0.2 at an atmospheric pressure of 100 in the open back-volume configuration. The shaded region indicates the statistical variation on the experimental results (±2σ) by taking into account the standard deviation of the peak location (first natural frequency) and amplitude variation. The mean amplitude of the experimental results (obtained after frequency-shifting to the mean peak location frequency) is shown as a dashed line. The 5 measurements are plotted as dotted lines.