Figure 1.
Download original image
(A) Photograph of a fabricated L-CMUT and scheme of (B) its top view and (C) its cross section. The device consists of a beam that is pulled towards a stator by an electrostatic force. As this occurs, the gas in the cavity between beam and stator is expelled towards the slits and then departs from the chip, emitting ultrasound waves.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.