Open Access
Table 1.
Dimensions of an L-CMUT design.
| Parameter | Value |
|---|---|
| Electrostatic gap (base value), g 0 | 5.5 μm |
| Recess of the gap at the midpoint, s 0 | 0 μm |
| Static deflection at the midpoint, a 0 | 0.238μm |
| Thickness of the beam, b b | 3.4 μm |
| Width (“depth”) of the beam, h b | 75 μm |
| Length of the beam, L b | 794.5 μm |
| Clearance, h c | 1 μm |
| Aperture of the slit (back side), h s, back | 22 μm |
| Depth of the slit (back side), L s, back | 650 μm |
| Aperture of the slit (front side), h s, front | 22 μm |
| Depth of the slit (front side), L s, front | 400 μm |
| Edge-to-edge distance between back and front slit, δ b f | 9.72 μm |
| Number of beams, N b | 1484 |
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.