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Cited article:

Design and analysis of SAW pressure sensing element based on IDT/AlN/Mo/diamond multilayered structure

Xiaoxin Ma, Qiang Xiao, Yanping Fan, Xiaojun Ji

Acta Acust., 6 (2022) 38

Published online: 2022-09-14

DOI: https://doi.org/10.1051/aacus/2022038

This article has been cited by the following article(s):

Quartz-based resonant SAW pressure sensor employing laser-induced etching technique

Dapeng Guo, Zilin Li, Zhengkai Tang, Ruchuan Shi, Chengtao Luo, Hualin Li, Yupeng Yuan and Tao Han
Sensors and Actuators A: Physical 402 117642 (2026)
https://doi.org/10.1016/j.sna.2026.117642