| Issue |
Acta Acust.
Volume 5, 2021
|
|
|---|---|---|
| Article Number | 37 | |
| Number of page(s) | 6 | |
| Section | Audio Signal Processing and Transducers | |
| DOI | https://doi.org/10.1051/aacus/2021032 | |
| Published online | 26 August 2021 | |
Technical & Applied Article
Microplasma microphones
Laboratoire d’Acoustique de l’Université du Mans, UMR CNRS 6613, 72085 Le Mans, France
* Corresponding author: philippe.bequin@univ-lemans.fr
Received:
24
January
2021
Accepted:
16
August
2021
It is shown experimentally that a microplasma created by a microstructured electrode array is sensitive to sound pressure. In this paper, two electrode architectures are used to create the microplasma. The sensitivity of these microplasma microphones, close to 0.4 nA/Pa, is estimated using a waveguide and a calibration method by comparison with a reference microphone. An empirical expression of the acoustic pressure sensitivity of microdischarges is proposed. The predictions of this empirical model are in good agreement with the experimental data.
Key words: Microplasma / Electric discharges / Transduction / Microphone / Acoustical measurements and instrumentation
© P. Béquin et al., Published by EDP Sciences, 2021
This is an Open Access article distributed under the terms of the Creative Commons Attribution License (https://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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