| Issue |
Acta Acust.
Volume 6, 2022
|
|
|---|---|---|
| Article Number | 38 | |
| Number of page(s) | 5 | |
| Section | Physical Acoustics | |
| DOI | https://doi.org/10.1051/aacus/2022038 | |
| Published online | 14 September 2022 | |
Scientific Article
Design and analysis of SAW pressure sensing element based on IDT/AlN/Mo/diamond multilayered structure
1
School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, PR China
2
School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, PR China
* Corresponding author: jxj127@sjtu.edu.cn
Received:
23
August
2021
Accepted:
29
August
2022
The multilayer structure of surface acoustic wave sensor is an important development direction of surface acoustic wave devices in recent years. In this paper, the IDT/AlN/Mo/diamond structure of surface acoustic wave pressure sensing element is modeled and simulated. The influence of the thickness of AlN and IDT on pressure coefficient frequency and K2 were simulated and analyzed. The performance of surface acoustic wave pressure sensing element is compared when the metal layer is Mo, no metal layer and the metal layer is Pt. Finally, the relationship between frequency variation and pressure of the designed multilayer surface acoustic wave pressure sensing element is obtained. This research provides a good guidance for the design of surface acoustic wave pressure sensor.
Key words: Surface acoustic wave (SAW) / Pressure sensing element / Multilayer structure / Finite element method (FEM)
© The Author(s), published by EDP Sciences, 2022
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