Figure 2.
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Performance evaluation of dimensional variations of single-cycle IDT structures. (a) Three-dimensional modelling of IDT single period structure. (b) Rayleigh wave resonant mode. (c) Rayleigh wave anti-resonance mode. (d) The admittance curves Y11 under different AlN thicknesses. (e) The reflection coefficient S11 under different AlN thicknesses. (f) The effects of AlN thickness on electromechanical coupling coefficient k2 (%) and frequency quality factor Q. (g) The admittance curves Y11 under different Al electrodes thicknesses. (h) The reflection coefficient S11 under different Al electrodes thicknesses. (i) The effects of Al electrodes thickness on velocity of SAW and frequency quality factor Q.
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