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Table 2
Simulation parameters of the SAW resonators.
Normal SAW resonator | PnCs-SAW resonator | ||
---|---|---|---|
Parameters | Value | Parameters | Value |
Wavelength/λ (μm) | 6 | Wavelength/λ (μm) | 6 |
Electrode widths (μm) | 0.25 λ | Electrode widths (μm) | 0.25 λ |
Electrode thickness (μm) | 0.15 | Electrode thickness (μm) | 0.15 |
Aperture (μm) | 350 λ | Aperture (μm) | 350 λ |
IDT pairs | 40 | IDT pairs | 40 |
Number of reflectors | 80 | Number of PnCs | 80 |
Distance between IDT and reflector (μm) | 0.75 λ | Distance between IDT and PnCs (μm) | 0.75 λ |
Reflector thickness (μm) | 0.15 | Scatterer heights (μm) | 0.7 |
Reflector widths (μm) | 1.5 | Scatterer radius (μm) | 0.5 |
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